Strain mapping at nanometer resolution using advanced nano-beam electron diffraction

Electron Diffraction with Ten Nanometer Beam Size for Strain Analysis of Nanodevices

A method to perform nano-beam diffraction (NBD) in a transmission electron microscope with high spatial resolution and low convergence angle is proposed. It is based on the use of a properly fabricated condenser aperture of 1 micron in diameter, which allows an electron beam about 10 nm in size to be focused on the sample, with a convergence angle in the 0.1 mrad range. Examples of NBD patterns...

Nanometer-resolution fluorescence electron microscopy (nano-EM) in cultured cells.

Nano-resolution fluorescence electron microscopy (nano-fEM) pinpoints the location of individual proteins in electron micrographs. Plastic sections are first imaged using a super-resolution fluorescence microscope and then imaged on an electron microscope. The two images are superimposed to correlate the position of labeled proteins relative to subcellular structures. Here, we describe the meth...

Convergent beam electron diffraction

In convergent-beam electron diffraction (CBED) a highly convergent electron beam is focussed on to a small (~< 50 nm) area of the sample. Instead of the diffraction spots that are obtained in the back focal plane of the objective lens with parallel illumination in conventional selected-area electron diffraction, CBED produces discs of intensity. The point group can be determined uniquely from t...

Convergent beam electron diffraction

The development of new materials requires an understanding of their mode of growth and the nature of defects, interfaces and strains thereby incorporated. This paper shows how convergent beam electron diffraction (CBED) and large angle CBED (LACBED) can be used to analyse such problems. It is shown how CBED and LACBED can give two-beam rocking curves, which can be used to profile plane rotation...

Strain mapping at the nanoscale using precession electron diffraction in transmission electron microscope with off axis camera